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Wafer-to-Wafer Bonding and Packaging

Website URL: http://www-bsac.eecs.berkeley.edu/projects/ee245/Lectures/lecturepdfs/Lecture%2025%20Wafer%20Bonding%20and%20Packaging.pdf

Category: Mobile Communications

Wafer-to-Wafer Bonding and Packaging ... • Uses eutectic point in metal-Si phase diagrams to form silicides ... et al., Transducers ‘97 ...

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